| Annual · values | 2026 | 2024 | 2023 | 2022 | 2020 | 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Operating Cash Flow | 328.31 M USD | 245.68 M USD | 171.97 M USD | 136.70 M USD | 105.98 M USD | 18.15 M USD | 35.09 M USD | 64.17 M USD | 45.69 M USD | 1.57 M USD | -635000 USD | -2.43 M USD |
| Depreciation & Amortization | 21.03 M USD | 12.87 M USD | 12.39 M USD | 9.38 M USD | 13.83 M USD | 5.96 M USD | 4.85 M USD | 3.99 M USD | 8.29 M USD | 9.07 M USD | 9.77 M USD | 8.79 M USD |
| Stock-Based Compensation | 27.62 M USD | 28.58 M USD | 25.51 M USD | 24.43 M USD | 17.66 M USD | 10.59 M USD | 6.06 M USD | 5.67 M USD | 7.67 M USD | 6.25 M USD | 6.75 M USD | 7.67 M USD |
| Capital Expenditures | 28.51 M USD | 31.90 M USD | 22.57 M USD | 18.41 M USD | 3.83 M USD | 6.80 M USD | 7.54 M USD | 10.21 M USD | 4.00 M USD | 1.85 M USD | 5.79 M USD | 5.69 M USD |
| Cash Flow from Investing | -121.57 M USD | -226.55 M USD | -103.39 M USD | -55.69 M USD | -48.60 M USD | 4.10 M USD | 33.77 M USD | -32.52 M USD | -42.13 M USD | 1.95 M USD | -8.05 M USD | -7.78 M USD |
| Cash Flow from Financing | -75.15 M USD | -35.67 M USD | -9.47 M USD | -68.35 M USD | -53.70 M USD | -4.20 M USD | -23.91 M USD | -2.55 M USD | 5.27 M USD | 220000 USD | -675000 USD | -7.50 M USD |
| Dividends Paid | — | — | — | — | — | — | — | — | — | — | — | — |
| Stock Buybacks | 75.02 M USD | 25.07 M USD | 3.20 M USD | 65.26 M USD | 52.00 M USD | 744000 USD | 21.07 M USD | 27.00 M USD | — | 1.72 M USD | 5.34 M USD | 5.00 M USD |
| Free Cash Flow | 299.80 M USD | 213.77 M USD | 149.40 M USD | 118.30 M USD | 102.16 M USD | 11.34 M USD | 27.55 M USD | 53.96 M USD | 41.69 M USD | -275000 USD | -6.43 M USD | -8.12 M USD |
Onto Innovation Inc. is a leading provider of advanced process control solutions for the semiconductor industry. The company designs, develops, manufactures, and supports high-performance systems for metrology, defect inspection, lithography, and data analysis, enabling microelectronics device manufacturers to enhance yield, device performance, quality, and reliability. Its offerings also include process and yield management solutions tailored for bare silicon wafer production and wafer processing facilities. Onto Innovation serves customers across the semiconductor value chain with a unique perspective that optimizes critical paths, making operations smarter, faster, and more efficient. Operating in the electronic technology sector, specifically electronic equipment and instruments, the company supports global microelectronics production through its worldwide sales and service organization. Founded in 1940 and headquartered in Wilmington, Massachusetts, Onto Innovation plays a vital role in advancing semiconductor manufacturing precision and productivity.