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Annual · values202520242023202220212020201920182017201620152014
Operating Cash Flow118.31 M USD140.82 M USD156.87 M USD215.61 M USD150.19 M USD69.70 M USD-13.59 M USD46.97 M USD56.28 M USD-8.79 M USD18.27 M USD-16.05 M USD
Depreciation & Amortization17.61 M USD15.81 M USD13.07 M USD11.61 M USD10.82 M USD9.94 M USD7.88 M USD5.77 M USD5.00 M USD4.26 M USD4.87 M USD4.59 M USD
Stock-Based Compensation20.77 M USD20.95 M USD18.27 M USD13.44 M USD12.07 M USD10.48 M USD8.17 M USD7.78 M USD5.67 M USD5.18 M USD5.58 M USD4.81 M USD
Capital Expenditures11.29 M USD12.18 M USD20.66 M USD10.68 M USD8.72 M USD7.43 M USD11.97 M USD4.71 M USD7.29 M USD2.51 M USD1.83 M USD896000 USD
Cash Flow from Investing29.93 M USD-108.73 M USD-100.86 M USD-257.25 M USD-8.72 M USD-7.27 M USD-11.97 M USD-4.71 M USD-7.29 M USD-2.24 M USD-1.83 M USD-896000 USD
Cash Flow from Financing-124.49 M USD-71.19 M USD-68.27 M USD-65.48 M USD-52.45 M USD-2.39 M USD-13.41 M USD1.19 M USD15.07 M USD2.35 M USD37.52 M USD2.76 M USD
Dividends Paid
Stock Buybacks121.08 M USD60.49 M USD52.50 M USD57.49 M USD49.99 M USD7.50 M USD17.74 M USD
Free Cash Flow107.01 M USD128.64 M USD136.21 M USD204.92 M USD141.47 M USD62.27 M USD-25.56 M USD42.25 M USD49.00 M USD-11.29 M USD16.44 M USD-16.94 M USD

Axcelis Technologies, Inc. designs, manufactures, and services ion implantation and other processing equipment essential for semiconductor chip fabrication across the United States, Europe, and Asia Pacific. The company specializes in high-energy, high-current, and medium-current implanters tailored for diverse applications, including advanced silicon carbide power devices and engineered substrates. It supports the semiconductor industry with aftermarket lifecycle solutions such as spare parts, equipment upgrades, used tools, maintenance services, and customer training. Axcelis Technologies, Inc. recently announced an all-stock merger with Veeco Instruments to create a leading semiconductor equipment company, diversifying its portfolio with complementary capital equipment and expanding addressable markets. Notable product launches include the Purion Power Series+ for next-generation SiC power devices and the GSD Ovation ES for high-current batch implant capabilities. The company also pursues joint development programs, such as with GE Aerospace for high-voltage superjunction power devices. Founded in 1978 and headquartered in Beverly, Massachusetts, Axcelis Technologies, Inc. plays a critical role in enabling innovations in electric vehicles, AI datacenters, and advanced chip production.